In 2019 we wrote a blog post on the use of area-selective deposition (ASD) for the fabrication of Fully Self-Aligned Via (FSAV) structures and how this application could enable further downscaling in the semiconductor industry.
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About (my way of) academic leadership
-A reflection after 10 years of chairing the Plasma & Materials Processing group at TU/e
In 2021 it was 10 years ago that I took over the chair position of the Plasma & Materials Processing (PMP) group at the Department of Applied Physics of the Eindhoven University of Technology (TU/e). Since then I have been
Students in plasma processing
A sneak peek into the real world – part II: the student perspective
How a master course can provide insights into real-life industrial challenges In the previous blog on the master course “plasma processing science and technology” given at the Eindhoven University of Technology, a nice and concise explanation about the goal and
Unravelling complex nanoelectronic devices
A challenge-based learning assignment – part I: the teacher perspective
With the new academic year just started, this blogpost focuses on teaching, and describes the assignment we designed as part of a course on plasma processing. The inspiration for this assignment is that we all are accustomed to the marvels
Conformal deposition and gap-fill by plasma ALD – some great TEM images and recently published cover art
The ability of atomic layer deposition (ALD) to grow highly conformal thin films is one of the main reasons why ALD is so popular in research and heavily employed in the semiconductor industry.1,2 This not only holds for thermally-driven ALD.
Diving into the Fundamentals of Spatial Atomic Layer Deposition – Strengthening the S-ALD hub in Brainport region Eindhoven
On May 1st, we kicked off our new research project entitled “Spatial Atomic Layer Deposition – More Materials, More Demanding Applications” , granted by the NWO Domain Applied and Engineering Sciences. As the title suggests, the project is geared at
A new flavor of ALE – What plasmas can bring to isotropic etching (a radical approach)
Plasmas can offer more than just etching straight down. This blog post aims to show that the etching community can benefit greatly from using plasmas for new applications. Currently, in the atomic layer etching (ALE) community plasmas are often considered
What 2020 brought to the ALD/Database – Ternary materials and multi-step ALD processes are trending!
Key findings: ALD/Database continued to grow in 2020 by 323 new entries reaching 4527 entries in total. In 2020, we saw the introduction of: 123 new ALD processes, 20 new precursors, 17 new materials. Trending: most new ALD process go
Control of the ion energy during plasma-based atomic-scale processing – animation and publication on tailored waveform biasing
This post is about the value of industry-academia partnerships, and about how such collaborations can trigger new innovations. This month exactly 3 years ago, we were approached by Prodrive Technologies, a company in the Eindhoven area developing and manufacturing electronics
Introducing the AtomicLimits Image Library – finding images for re-use!
We are very happy to introduce our latest project to serve the community: the AtomicLimits Image Library! You can find this page in the menu at the top of the website. The image library is a central place where you