Marc Merkx

I am a postdoc researcher at Eindhoven University of Technology, where I work on employing small inhibitor molecules in advanced ALD cycles in order to acquire area-selective ALD. I mainly focus on gaining insight into the mechanisms underlying area-selective ALD using in-situ characterization techniques.

Area-selective ALD of diffusion barriers for via optimization – There is plenty of room at the bottom

Please cite as M.J.M. Merkx, A.J.M. Mackus, Area-selective ALD of diffusion barriers for via optimization – There is plenty of room at the bottom. 2022, 7. AtomicLimits. This week the 6th area-selective deposition (ASD) workshop will be held in San Francisco, California. During this workshop, we will present our latest work on area-selective ALD of TaN.1 … Read more

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