Spatial ALD day – June 9th, register here!

On June 9th 2022, we will organize a spatial ALD day at the Eindhoven University of Technology. This full-day on-site (not online!) event will cover various aspects of spatial ALD, including presentations by spatial ALD companies in the Netherlands, as well as overview and in-depth presentations about (spatial) ALD and its applications. This day is inspired by and part of our spatial ALD research project, funded by NWO. See also our earlier blogpost on this project.

Register using the form below. Preferably register by June 1st such that we can accommodate all dietary wishes etc.
If you already pre-registered you will receive an e-mail kindly requesting you to register. So note: a preregistration does not count as a full registration!

Program

• 08.45 – 09.00 Badge collection
• 09.00 – 10:30ALD Academysession
  • Introduction to ALD (Erwin Kessels, 09.00 – 09.45)
  • Introduction to spatial ALD (Paul Poodt, 09.45 – 10.30)
• 10.30 – 11:00 Coffee and badge collection
• 11.00 – 11:10 Opening & Welcome (Bart Macco)
• 11.10 – 12:30Invited talks
  • Spatial ALD research at LMGP (David Muñoz-Rojas, Grenoble INP, 11.10 – 11.50)
  • Precursor Chemistry for Spatial ALD, (Nils Boysen, RU Bochum, 11.50 – 12.30)
• 12.30 – 14:00 Lunch break
• 14.00 – 15:40Company contributions – I
  • Introduction to afternoon session (Bart Macco, TU/e, 14.00 – 14.10)
  • Spatial ALD at Beneq (Philipp Maydannik, Beneq, 14.10 – 14.40)
  • PillarHall Lateral High Aspect Ratio Structures (Miiko Utriainen, Chipmetrics, 14.40 – 14.50)
  • Spatial ALD at SALD (Erik Kremers, SALD, 14.50 – 15.10)
  • Large-scale continuous coating of powders to enhance materials (René Hauser, Delft IMP, 15.10 – 15.20)
  • Design challenges and solutions for Spatial ALD equipment (Jeroen Smeltink, SALDtech, 15.20 – 15.40)
• 15.40 – 16:00 Coffee break
• 16.00 – 17:20 Company contributions – II
  • Levitrack ALD for Perovskite tandem solar cell manufacturing (Mark Steltenpool, Levitech, 16.00 – 16.10)
  • Scaling R2R production: InnoFlex rolls their own way (Kevin Lagarde, Innoflex, 16.10 – 16.30)
  • Spatial ALD at Smit Thermal Solutions (Marc van der Velden, Smit Thermal Solutions, 16.30 – 16.40)
  • Spatial ALD for Energy Applications (Paul Poodt, TNO, 16.40 – 17.00)
  • Parallel Precursor Wave ALD : Minimizing the purge times of temporal ALD (Jacques Kools, Encapsulix, 17.00 – 17.20)
• 17:20 – 17:30 Closing remarks (Bart Macco, TU/e)
• 17:30 – 18:30 Closing drinks & networking
• 17:30 – 18:30 Parallel lab tour

Registration