Adrie Mackus, Marc Merkx Recently, the 4th Area Selective Deposition workshop (ASD2019) took place at IMEC in Leuven, Belgium. During this workshop it became clear that the main application the semiconductor industry is currently looking at for area-selective atomic layer
The dawn of atomic-scale processing
– The growing importance of atomic layer deposition and etching
A few weeks ago, the big news was that the research alliance of IBM, Global Foundries and Samsung unveiled the world’s first 5 nm chip as we could all read everywhere over the internet [1]. Most notable was however the