The ability of atomic layer deposition (ALD) to grow highly conformal thin films is one of the main reasons why ALD is so popular in research and heavily employed in the semiconductor industry.1,2 This not only holds for thermally-driven ALD.
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Diving into the Fundamentals of Spatial Atomic Layer Deposition – Strengthening the S-ALD hub in Brainport region Eindhoven
On May 1st, we kicked off our new research project entitled “Spatial Atomic Layer Deposition – More Materials, More Demanding Applications” , granted by the NWO Domain Applied and Engineering Sciences. As the title suggests, the project is geared at
A new flavor of ALE – What plasmas can bring to isotropic etching (a radical approach)
Plasmas can offer more than just etching straight down. This blog post aims to show that the etching community can benefit greatly from using plasmas for new applications. Currently, in the atomic layer etching (ALE) community plasmas are often considered
What 2020 brought to the ALD/Database – Ternary materials and multi-step ALD processes are trending!
Key findings: ALD/Database continued to grow in 2020 by 323 new entries reaching 4527 entries in total. In 2020, we saw the introduction of: 123 new ALD processes, 20 new precursors, 17 new materials. Trending: most new ALD process go
Control of the ion energy during plasma-based atomic-scale processing – animation and publication on tailored waveform biasing
This post is about the value of industry-academia partnerships, and about how such collaborations can trigger new innovations. This month exactly 3 years ago, we were approached by Prodrive Technologies, a company in the Eindhoven area developing and manufacturing electronics
Introducing the AtomicLimits Image Library – finding images for re-use!
We are very happy to introduce our latest project to serve the community: the AtomicLimits Image Library! You can find this page in the menu at the top of the website. The image library is a central place where you
Understanding plasma ALD – Why ions matter… and should be considered!
[Note: a recording of my presentation for the 2020 Coburn and Winters Student Award competition can be viewed at the bottom of this page] This year I had the honor of being a finalist in the AVS Coburn and Winters
Visualizing the contributions of key authors to the field of ALD – Exploring newly implemented functionality of the ALD/Database
It is more than 2 years ago that Elsa Alvaro (Northwestern University Libraries) and Angel Yanguas-Gil (Argonne National Laboratory) published their research article “Characterizing the field of Atomic Layer Deposition: Authors, topics, and collaborations” in PLOS ONE. This article provided
#ALDALE2020 – The prime conference in the field of atomic scale processing brought to your home
One of the most exciting presentations I saw in last year was given by Rajesh Krishnamurthy, a senior technology analyst of TechInsights. He was invited at the 19th International Conference on Atomic Layer Deposition in Bellevue WA, which also featured
ALD in the Netherlands – Special issue of the NEVAC magazine (free): How a small country can be big in nanolayers
The Dutch Vacuum Society – or Nederlandse Vacuümvereniging (NEVAC) – publishes the so-called “NEVAC blad”, a magazine that appears three times a year. The issue for June 2020 just appeared and it is a special issue completely devoted to atomic