Home  /    /  Basic insights into ALD conformality – PDF

Basic insights into ALD conformality – PDF

Comments are off
Basic insights into ALD conformality – PDF
2500 Downloads
Download Now!

About Author

Karsten Arts

I am a PhD candidate at the Eindhoven University of Technology, working in the Plasma and Materials Processing group. My research is focused on fundamental aspects of plasma-assisted ALD and thin film conformality.

Our sponsors
Contact us at info@atomiclimits.com
X