Note: This post can also be downloaded at the bottom of this page. Please cite as: K. Arts, W.M.M. Kessels and H.C.M Knoops. Basic insights into ALD conformality – A closer look at ALD and thin film conformality. 2020, 1.
I am a PhD candidate at the Eindhoven University of Technology, working in the Plasma and Materials Processing group. My research is focused on fundamental aspects of plasma-assisted ALD and thin film conformality.