On the role of ions during plasma ALD – An animation summarizing many years of our research

Last year we finished a project called “Taking plasma ALD to the next level” (funded by the Netherlands Organization for Scientific Research (NWO), Applied and Engineering Sciences (AES) section). This project was devoted to obtaining a better understanding of plasma ALD such that open scientific and technological questions could be addressed resulting in new plasma … Read more

Atomic Limits company talk: Trymax — Innovative plasma based equipment solutions

“An interview with Peter Dijkstra and Karsten Arts.” This is already the fourth post in a series of blogs in which we will share exciting information about companies or other organizations within the atomic scale processing industry. Through an interview, we aim to get insight into the kind of products and projects the companies have … Read more

After enabling AI it is time for the plasma community to benefit from AI – Personal view in a short perspective article

This blog post is about a short perspective article that I recently wrote for the ILTPC newsletter. ILTPC stands for the International Low Temperature Plasma Community. It is one of the two main communities where I feel at home. The other one is the atomic scale processing community. This one is basically the atomic layer … Read more

AtomicLimits company talk: ATLANT 3D – Atomic layer processing technology

“An interview with Maksym Plakhotnyuk.” This is another post in a series of blogs in which we will share exciting information about companies or other organizations within the atomic scale processing industry. Through an interview, we aim to get insight into the kind of projects the companies have and in what way they see these … Read more

Let’s chat GPC by chatGPT – Putting ChatGPT to the test and a first (?) article about ALD by AI

I’m sure you have heard the buzz in the field of artificial intelligence (AI)… The promise of AI is to augment human abilities in areas such as decision-making, problem-solving, and other tasks. AI systems aim to simulate human intelligence and learn from data to improve their performance over time. ChatGPT is an AI language model … Read more

A review on Atomic Layer Deposition of (semi)conductive oxides – The role of ALD in these emerging materials and their applications

Quick link to open access paper: Applied Physics Reviews 9, 041313 (2022) Earlier this month I published my review paper entitled Atomic layer deposition of conductive and semiconductive oxides. It was an invited review for Applied Physics Reviews and I was very happy to see it picked as Featured article![1] In case you are not familiar … Read more

Foundations of atomic-level plasma processing in nanoelectronics – Smaller, thinner, taller, etc … all enabled by plasmas

***Quick link to the open access paper: “Foundations of atomic-level plasma processing in nanoelectronics”*** We have just published a topical review paper entitled “Foundations of atomic-level plasma processing in nanoelectronics” in the journal Plasma Sources Science and Technology. This review is part of a two-part collection of papers on Foundations of Low Temperature Plasmas and … Read more

AtomicLimits company talk: SparkNano — and their aim to commercialize spatial ALD for the energy market

Cover image: SparkNano engineers in the lab (courtesy of TNO) An interview with Huib Heezen and Paul Poodt This is the second post in a new series of blogs in which we will share exciting information about companies or other organizations within the atomic scale processing industry. Through an interview, we aim to get insight into … Read more

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