Miika Mattinen

1 Articles

I am a postdoc at Eindhoven University of Technology working on plasma-enhanced atomic layer deposition (PEALD) of 2D materials. I have been doing research on ALD since 2014 with PhD (2020) and MSc (2015) degrees from University of Helsinki. I have covered wide range of materials (in particular sulfides, but also oxides, selenides, metals...) and applications (electronics, optoelectronics, sensors, electrocatalysis...) and I am enthusiastic to expand my ALD knowledge fruther.

Highlights

June 14, 2022

Update of the Atomic Scale Processing ReviewBase – Easy-to-access overview of ALD and ALE reviews (extended), ASD reviews (new) and ALD book chapters (new)

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In late March, we launched our ReviewBase, a listing of atomic layer deposition (ALD) and atomic layer etching (ALE) review articles. The ReviewBase files available in Excel and PDF formats have been downloaded more than 500 times altogether in a