The dawn of atomic-scale processing
– The growing importance of atomic layer deposition and etching
A few weeks ago, the big news was that the research alliance of IBM, Global Foundries and Samsung unveiled the world’s first 5 nm chip as we could all read everywhere over the internet [1]. Most notable was however the fact that they reported the use of horizontal gate-all-around field-effect-transistors (GAA-FETs) in which they actually … Read more