Illustration showing how selective etching steps can be employed as corrections step for defect formation during area-selective ALD to achieve a high selectivity. Mackus et al., Chem. Mater. 2019, 31, 2−12
Illustration showing how selective etching steps can be employed as corrections step for defect formation during area-selective ALD to achieve a high selectivity. Mackus et al., Chem. Mater. 2019, 31, 2−12