ABC-type ALD process

Schematic illustration of the ABC-type ALD approach for area-selective ALD using small inhibitor molecules. In step A, the inhibitor molecules are dosed and selectively adsorb on the nongrowth area. In step B, the precursor molecules are dosed and are blocked from adsorption on the non-growth area by the inhibitor molecules. Finally, the inhibitor molecules and the precursor ligands are removed by the co-reactant in step C.
Merkx et al., Chem. Mater. 2020, 32, 3335−3345