ALD of high-quality hydrogen-doped indium oxide
– a mini-review
I recently successfully defended my PhD thesis, entitled “Atomic Layer Deposition of Metal Oxide Thin Films for Si Heterojunction Solar Cells”. As the title suggests, I have worked on ALD of various metal oxides for the application in Si heterojunction solar cells. It was however one material in particular, hydrogen-doped indium oxide In2O3:H, that dominated … Read more