MoS2-PEALD-450C

Akhil Sharma et al. Adapted from Nanoscale, 2018, 10, 8615-8627 DOI: 10.1039/C8NR02339E

Recent Comments

Alumina Ceramic in Semiconductor Manufacturing丨ADCERAX® on On the role of ions during plasma ALD – An animation summarizing many years of our research
Pocket wafers + test chips for ALD: faster conformality learning, lower risk - Chipmetrics on Advancing Thin Film Metrology in 3D Structures — The Benefits of the PillarHall Concept
Enabling Precision: ALD in Energy Storage and Conversion | Beneq on What can Atomic Layer Deposition do for solar cells? – A few afterthoughts from my ALD conference tutorial

X