ALD conformality: reaction probabilities and surface coverage

Karsten Arts, Basic insights into ALD conformality – A closer look at ALD and thin film conformality, AtomicLimits (2020)

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Bart Macco

I'm an assistant professor at the Eindhoven University of Technology with a passion for atomic-scale processing of semiconductor nanolayers. Moreover, I'm the person managing this blog! Hope you like it!

About Author

Bart Macco

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