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Area-selective ALD of TiN

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Area-selective ALD of TiN

False color TEM image of area-selective TiN ALD on a nanoscale pattern.
Merkx et al., Chem. Mater. 2020, 32, 7788−7795

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Bart Macco

I'm an assistant professor at the Eindhoven University of Technology with a passion for atomic-scale processing of semiconductor nanolayers. Moreover, I'm the person managing this blog! Hope you like it!

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