Schematic illustration of our strategy for area-selective ALD: using functionalization and etching steps in advanced ALD cycles to achieve high selectivity. Mackus et al., Chem. Mater. 2019, 31, 2−12
Schematic illustration of our strategy for area-selective ALD: using functionalization and etching steps in advanced ALD cycles to achieve high selectivity. Mackus et al., Chem. Mater. 2019, 31, 2−12