Save the Date & Register Now: Second Edition of the Spatial ALD Day – October 28, 2025

We are excited to announce the second edition of the Spatial ALD Day, which will take place on Tuesday, October 28, 2025! This event follows the highly successful first Spatial ALD Day we organized at the start of our NWO OTP project on spatial ALD. As our project now nears its conclusion, we look forward to bringing the community together once again for a day of insightful discussions, technical deep dives, and networking.

💡 Want to know what to expect? Check out our recap of the first Spatial ALD Day edition here, featuring photos and presentation downloads!

Preliminary Program

The event will feature a mix of technical talks, discussions, and networking opportunities:

• Morning Tutorial Session – A deep dive into key topics in spatial ALD. (Bart Macco)
• Scientific Highlight Presentation – A summary of key results from our NWO OTP project on spatial ALD, with emphasis on:
  • Doping and alloying
  • Plasma-enhanced spatial ALD
  • Conformality in (plasma-enhanced) spatial ALD
• Invited Presentations – Talks by AirLiquide (Jamie Greer) and Powall (Sébastien Moitzheim), providing insights from industry leaders.
• Technical Presentations – Technical presentations by various companies and institutes in the field of spatial ALD. Confirmed speakers:
  • Paul Poodt (SparkNano)
  • Hindrik de Vries (SALD)
  • Fred Roozeboom (TU Twente)
  • Fieke van den Bruele (TNO/Holst)
• Lab Tour – Explore our lab facilities and see spatial ALD in action during the lunch break.
• Networking & Dinner – The event will conclude with networking drinks and a dinner buffet at the university.

The final program will follow soon, but for now—mark your calendars and sign up! We look forward to seeing you in October.

Registration

We are now accepting registrations! If you would like to attend, please sign up below: