We just published a perspective article entitled “From the bottom-up: towards area-selective atomic layer deposition with high selectivity”.1 This perspective describes the current status of the field of area-selective atomic layer deposition (ALD), and also includes my vision on how we can improve the selectivity. It is published in Chemistry of Materials as part of … Continue reading Towards Area-Selective Atomic Layer Deposition with High Selectivity
– Our perspective on area-selective ALD